DualBeam SEM

FEI Helios Nanolab™ 660 DualBeam™ Microscope



  • Isotropic 3D data acquisition
  • High Efficiency detectors for SE and BSE imaging
  • Precision 5-axes motorized stage
  • Cryo capability (Quorum PP3000T)
  • < 1.0 nm SEM resolution at all keVs
  • < 4.0 nm ion beam resolution
  • High throughput FIB milling up to 65 nA
  • Low kV FIB imaging down to 500 V

About the Helios

The FEI Helios Nanolab™ 660 DualBeam™ platform is designed to access a new world of extreme high resolution 2D and 3D characterization, nanoprototyping, and higher quality sample preparation. Creating the most complex structures at the nanoscale is equally possible with extensive range of beam chemistries (gas injection), 16-bit pattern generator and integrated CAD, script or library-based patterning. Robust, precise FIB slicing, combined with a high precision piezo stage and superb SEM performance support automated software for unattended sample preparation or 3D characterization and analysis.

View the Helios Nanolab™ 660 DualBeam™ Technical Bulletin
Visit the FEI web page describing the Helios Nanolab™

Image from Helios SEM analysisImage from Helios SEM analysis


Collaborative Life Science Building (CLSB)

Fast Facts

  • Ideal for the analysis of surface proteins and topographies.
  • The second beam, a focused ion beam, blasts off the surface of a sample (like a sandblaster) to reveal information just under the surface in order to provide a novel 3D picture of cell volume.
  • The scanning/blasting process known as "slice and view" takes approximately 16 to 24 hours.

Publications featuring Helios images

 Monique Y. Rennie, Curran G. Gahan, Claudia S. López, Kent L. Thornburg and Sandra Rugonyi. 3D Imaging of the Early Embryonic Chicken Heart with Focused Ion Beam Scanning Electron Microscopy. Microscopy and Microanalysis. 2014 Aug; 20(4):1111-9. doi:10.1017/S1431927614000828.